专利名称：Inspecting system and inspecting method发明人：Atsushi Miyake申请号：US12889124申请日：20100923公开号：US08089636B2公开日：20120103
专利附图：
摘要：An object of the present invention is to apply a phase shift method to aworkpiece having a rough surface to accurately detect an abnormal concave-convexirregularity. Therefore, in an inspecting system of the present invention, an image of astripe pattern reflected on an inspection target surface is detected at a shallow angle,
and one or more continuous unit stripes of a unit stripes reflected image is specifiedamong the stripe pattern reflected images existing in a predetermined distance rangecounted from the edge in a closer side to the workpiece. Then, the phase of the specifiedunit stripes reflected image is varied to apply a phase shift method and scan theinspection target surface with the unit stripes reflected image to thereby detect theabnormal concave-convex irregularity.
申请人：Atsushi Miyake
地址：Nishinomiya JP
国籍：JP
代理机构：Alleman Hall McCoy Russell & Tuttle LLP
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