Operating method for inspecting equipment

专利名称：Operating method for inspecting equipment发明人：Stojan Kanev,Yung-Chin Liu,Andrej

Rumiantsev,Yao-Chuan Chiang

申请号：US14996282申请日：20160115公开号：US10048844B2公开日：20180814

专利附图：

摘要：The instant disclosure provides an operating method of inspecting equipment,with the method applicable to semiconductor inspecting equipment having a movableelement. The method includes: displaying a wafer graphic by a touch display; detecting a

touch signal generated by the touch display; detecting the magnification of the wafergraphic when the touch signal is generated; and determining the moving speed of themovable element based on the magnification of the wafer graphic when the touch signalis generated. In addition, the moving direction of the movable element can be

determined according to the touch signal. Through the instant disclosure, the operatorcan more intuitively operate each movable element of semiconductor inspectingequipment.

申请人：MPI Corporation

地址：Chu-pei, Hsinchu County TW

国籍：TW

代理机构：McClure, Qualey & Rodack, LLP

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