X-RAY IMAGE MAGNIFYING DEVICE

专利名称：X-RAY IMAGE MAGNIFYING DEVICE发明人：OHBA, AKIRA,SUGIYAMA, MASARU,ONODA,

SHINOBU

申请号：EP03712806申请日：20030320公开号：EP1492129A4公开日：20071205

摘要：The X-ray image magnifying device according to the present invention is

provided with an illumination optical system 3 for irradiating the X-ray emitted from an X-ray source 1 to a sample 4, an objective lens 5 configured by an oblique incidence mirrorcomposed of a rotary hyperboloidal surface and a rotary ellipsoidal surface formagnifying and focusing the X-ray penetrating through the sample 4 onto a

predetermined position, an X-ray image detecting means 6 for detecting the X-ray imagefocused, and a focusing magnification adjusting means for adjusting the focusingmagnification of the X-ray image by moving at least one of the X-ray image detectingmeans 6, the sample 4 and the illumination optical system 3 along the optical axisdirection. Thereby, in the X-ray image magnifying device using the grazing incidencemirror as the objective lens, the focusing magnification can be changed withoutexchanging the grazing incidence mirror.

申请人：HAMAMATSU PHOTONICS K.K.

更多信息请下载全文后查看