专利名称：METHOD AND DEVICE FOR PRODUCING
NANO-STRUCTURED SURFACES
发明人：LUTZ EHRENTRAUT,ARKADI
ROSENFELD,INGOLF HERTEL
申请号：US13155495申请日：20110608
公开号：US20110297653A1公开日：20111208
摘要：An apparatus and a method for producing nanostructured surfaces areparticularly suited for producing surfaces having very low roughness over large lateralextents. The method includes the following steps: providing an article having a surface tobe structured; generating short-pulse laser radiation with laser pulses whose pulsedurations lie in the subnanosecond range, preferably in the range of 100 fs to 300 fs,directing the short-pulse laser radiation onto the surface to be structured on the article,such that a fluence F of each individual pulse of the short-pulse laser radiation is less thana multishot threshold fluence Ffor a multishot laser ablation, but the fluence F is chosento be high enough that defects can be produced by way of nonlinear interactions.Preferably, a fluence F in the range of 65% to 95% of the multishot threshold fluenceFfor a multishot laser ablation is used.
申请人：LUTZ EHRENTRAUT,ARKADI ROSENFELD,INGOLF HERTEL
地址：ZEUTHEN DE,BERLIN DE,BERLIN DE
国籍：DE,DE,DE
更多信息请下载全文后查看
因篇幅问题不能全部显示，请点此查看更多更全内容