DEVICE AND METHOD OF PRODUCING A STRUCTURED ELEMEN

专利名称：DEVICE AND METHOD OF PRODUCING A

STRUCTURED ELEMENT, AND STRUCTUREDELEMENT

发明人：Michael Werner,Robin Zimny申请号：US15579130申请日：20160511

公开号：US20180161924A1公开日：20180614

专利附图：

摘要：A method produces a structured element by material-removing machining of aworkpiece with pulsed laser radiation, the workpiece consisting of a workpiece material

transparent to the laser radiation, the laser radiation being radiated into the workpiecefrom a radiation entry side and, in an area of a rear side of the workpiece located

opposite the radiation entry side, being focused within the workpiece in a focus area suchthat workpiece material is removed in the focus area by multi-photon absorption, andincludes bringing the rear side of the workpiece, at least in a machining area currentlybeing machined around the focus area, into contact with a free-flowing liquid transparentto the laser radiation, wherein at least some of the liquid is set to flow in a directiontowards the machining area such that the liquid flows into the machining area at an acuteangle of 60° or less to the rear side.

申请人：3D-Micromac AG

地址：Chemnitz DE

国籍：DE

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