Diffusion tube, dopant source for a diffusion proc

专利名称：Diffusion tube, dopant source for a diffusion

process and diffusion method using thediffusion tube and the dopant source

发明人：Gi-bum Kim,Taek Kim,Jae-min Myoung,Min-chang Jeong

申请号：US11673321申请日：20070209公开号：US07963247B2公开日：20110621

专利附图：

摘要：According to an exemplary embodiment of the present invention, a diffusion

tube includes a diffusion housing which includes a first cavity within a first end whichreceives a diffusion target, a second cavity within a second end which receives a dopantsource for diffusion, and a diffusion port disposed between the diffusion target and thedopant source, wherein the diffusion port provides fluid communication between the firstcavity and the second cavity.

申请人：Gi-bum Kim,Taek Kim,Jae-min Myoung,Min-chang Jeong

地址：Yongin-si KR,Yongin-si KR,Seoul KR,Seoul KR

国籍：KR,KR,KR,KR

代理机构：Cantor Colburn LLP

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